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1

[IEEE 2004 8th International Conference on Control, Automation, Robotics and Vision (ICARCV) - Kunming, China (6-9 Dec. 2004)] ICARCV 2004 8th Control, Automation, Robotics and Vision Conference, 2004. - Self-compensating closed loop real-time robotic polishing system

Wen-Jong Lin,, Bryan Tsong-Jye Ng,, Xiaoqi Chen,, Zhiming Gong,, Jingbing Zhang,, Kiew Choon Meng,

Year:

2004

Language:

english

File:

PDF, 1.30 MB

english, 2004

2

[IEEE 2009 IEEE/ASME International Conference on Advanced Intelligent Mechatronics (AIM) - Singapore (2009.07.14-2009.07.17)] 2009 IEEE/ASME International Conference on Advanced Intelligent Mechatronics - Finite element analysis of PMMA pattern formation during hot embossing process

Kiew, Choon Meng, Lin, Wen-Jong, Teo, Tat Joo, Tan, Jun Liang, Lin, Wei, Yang, Guilin

Year:

2009

Language:

english

File:

PDF, 471 KB

english, 2009

3

[IEEE 2013 10th IEEE International Conference on Control and Automation (ICCA) - Hangzhou, China (2013.06.12-2013.06.14)] 2013 10th IEEE International Conference on Control and Automation (ICCA) - Study of web guide slippage phenomena in roll-to-roll embossing syste

Tan, Henry, Wenjing, Ma, Binglu, Du, Loong, Chow Siew, Meng, Kiew Choon, Tay, Arthur

Year:

2013

Language:

english

File:

PDF, 764 KB

english, 2013

4

[IEEE 2010 IEEE International Conference on Robotics and Automation (ICRA 2010) - Anchorage, AK (2010.05.3-2010.05.7)] 2010 IEEE International Conference on Robotics and Automation - Model-based control of a high-precision imprinting actuator for micro-channel fabrications

Tat Joo Teo,, I-Ming Chen,, Choon Meng Kiew,, Guilin Yang,, Wei Lin,

Year:

2010

Language:

english

File:

PDF, 871 KB

english, 2010

5

SPIE Proceedings [SPIE Advanced Lithography - San Jose, CA (Sunday 25 February 2007)] Metrology, Inspection, and Process Control for Microlithography XXI - Real-time spatial control of photoresist development rate

Tay, Arthur, Archie, Chas N., Ho, Weng-Khuen, Hu, Ni, Kiew, Choon-Meng, Tsai, Kuen-Yu

Year:

2007

Language:

english

File:

PDF, 248 KB

english, 2007

6

Hot-Embossing of Microstructures on Large Area of Polymers

Lin, Wei, Chen, Wen Jie, Kiew, Choon Meng, Ng, Chuen Leong, Luo, Hong, Teo, Chek Sing, Yang, Gui Ling

Journal:

Key Engineering Materials

Year:

2010

Language:

english

File:

PDF, 729 KB

english, 2010

7

[IEEE 2005 IEEE Instrumentationand Measurement Technology - Ottawa, ON, Canada (16-19 May 2005)] 2005 IEEE Instrumentationand Measurement Technology Conference Proceedings - In Situ Measurement & Control of Photoresist Develpment in Microlithorgraphy

Choon Meng Kiew,, Tay, A., Weng Khuen Ho,, Khiang Wee Lim,, Ying Zhou,

Year:

2005

Language:

english

File:

PDF, 563 KB

english, 2005

8

Optimal Feed-Forward Control for Multizone Baking in Microlithography

Ho, Weng Khuen, Tay, Arthur, Chen, Ming, Kiew, Choon Meng

Journal:

Industrial & Engineering Chemistry Research

Year:

2007

Language:

english

File:

PDF, 359 KB

english, 2007

9

Robust forecasts and run-to-run control for processes with linear drifts

Jay H. Lee, Choon Meng Kiew

Journal:

Journal of Process Control

Year:

2009

Language:

english

File:

PDF, 538 KB

english, 2009

10

[IEEE 2014 13th International Conference on Control Automation Robotics & Vision (ICARCV) - Singapore (2014.12.10-2014.12.12)] 2014 13th International Conference on Control Automation Robotics & Vision (ICARCV) - Roll-to-roll web handling for membrane inspection

Tan, Henry, Tay, Arthur, Qiang, Ng Bing, Keat, Chong Wee, Meng, Kiew Choon, Loong, Chow Siew

Year:

2014

Language:

english

File:

PDF, 981 KB

english, 2014

11

[IEEE The 17th Annual SEMI/IEEE ASMC 2006 Conference - Boston, MA (May 22-24, 2006)] The 17th Annual SEMI/IEEE ASMC 2006 Conference - Robust Real-Time Thin Film Thickness Estimation

Choon Meng Kiew,, Tay, A., Weng Khuen Ho,, Khiang Wee Lim,, Lee, J.H.

Year:

2006

Language:

english

File:

PDF, 676 KB

english, 2006

12

Model-Based Compensation of Thermal Disturbance in a Precision Linear Electromagnetic Actuator

Hey, Jonathan, Choon Meng Kiew,, Guilin Yang,, Martinez-Botas, Ricardo

Journal:

IEEE/ASME Transactions on Mechatronics

Year:

2014

Language:

english

File:

PDF, 1.70 MB

english, 2014

13

SPIE Proceedings [SPIE Microlithography 2005 - San Jose, CA (Sunday 27 February 2005)] Data Analysis and Modeling for Process Control II - Real-time control of photoresist development process

Tay, Arthur, Emami, Iraj, Ho, Weng-Khuen, Kiew, Choon-Meng, Zhou, Ying, Lee, Jay H.

Year:

2005

Language:

english

File:

PDF, 575 KB

english, 2005

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